A method for calibrating a robotic arm mounted on active magnetic bearings

摘要

1. A method for automatic calibration of the manipulator mounted on active magnetic bearings and having a gripper which can be installed vertically along the Z axis for capturing and processing of silicon wafers and install them in a shipping box in which may contain a plurality of silicon wafers at fixed vertical intervals, wherein the gripper can be moved in the first magnetic bearing along the X axis and the second magnetic bearing along the Y axis, wherein separation of the first and second magnetic n dshipnikov on, in each case, four points (6a, 6b, 6c, 6d; 6e, 6f, 6g, 6h) installation; determining coordinates of the center point of installation of the axes X, Y, Z and also the values ​​of the installation point for the angular positions δ , ε and transforming installation point values ​​into values ​​installation point for upright installation point, in each case, four points (6a, 6b, 6c, 6d; 6e, 6f, 6g, 6h) installation; set force F1-F4 drive for electromagnets, in each case, four points (6a, 6b, 6c, 6d; 6e, 6f, 6g, 6h) setting, determining the current vertical position in each case, in each case, four points (6a, 6b, 6c, 6d; 6e, 6f, 6g, 6h) installation; measured current vertical position z, in each case, four points (6a, 6b, 6c, 6d; 6e, 6f, 6g, 6h) plant and converted into actual coordinates of the center; comparing actual coordinates of the center of the center coordinates of the mounting point, determining the deviation, and repeat the previous steps, setting the corrected values ​​installation point, the coordinates of the center point of the installation, as long dormancy deviation from the actual coordinates of the center coordinates of the center point yc