Method for the microscopic measurement of samples by means of short-coherent interferometry

摘要

The invention relates to a method for microscopically measuring a sample (250), in particular by means of depth-resolved phase measurements of scattering or multilayer samples with an optical coherence tomography measuring device, wherein the sample (250) is illuminated with light (21) of a light source (20), wherein the light (23) modified by the sample is made to interfere with reference light (22) at a light sensor (10), the resulting light signal is converted by the light sensor (10) into a measurement signal (11), and by detection and processing the measuring signal (11) a depth-resolved interference signal (30) is determined. According to the invention, phase images (42) are determined from the depth-resolved interference signal (30), and an unpacked phase image (50) is generated by comparing at least two of the determined phase images.