DEVICE AND METHOD FOR MEASURING AND COMPENSATING MOVEMENT INFLUENCES IN PHASE-SHIFT PROFILOMETERS AND THE APPLICATION THEREOF IN MOBILE, MANUALLY CONTROLLED PROFILOMETRY

摘要

The invention relates to a device and method for two or three-dimensional measurement with macroscopic, microscopic or sub-microscopic surface topographies by means of profilometry. According to the invention, phase-shift profilometer measurement errors which occur due to a relative movement between an object (3) and the measurement device during a measurement cycle are compensated. The invention is characterized in that a projector (1) projects a phase-shift master sequence having an integrated modulation image on an object (3). By means of a data processing unit (7), according to the invention measurement errors generated due to a relative movement of the object (3) to the measurement device can be compensated by means of a subsequent shift of images, generated by means of the image data, in opposition to the relative movements.