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METHOD AND DEVICE FOR EVALUATING SURFACE CHARACTERISTICS BASED ON THE ANGLE-RESOLVED STRAY LIGHT MEASURING METHOD WITH AUTOMATIC DETERMINATION OF THE POSITION OF THE WORKPIECE
METHOD AND DEVICE FOR EVALUATING SURFACE CHARACTERISTICS BASED ON THE ANGLE-RESOLVED STRAY LIGHT MEASURING METHOD WITH AUTOMATIC DETERMINATION OF THE POSITION OF THE WORKPIECE
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机译:基于角度分辨的杂散光测量方法并自动确定工件位置的表面特性评估方法和装置
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摘要
A method and apparatus for non-contact evaluation of the texture of a surface of the angle-resolved scattered light measurement comprises an optical sensor (10). From the measured reflected scattered light distribution, a characteristic value history is compared with a measured in a calibration process, pattern-course is determined during one revolution of the workpiece (30). If there is no match of characteristic value course and pattern-course, an error signal is generated.
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