STEREOSCOPIC IMAGE CONSTRUCTION SYSTEM FOR ELECTRON MICROSCOPE IMAGE, AND STEREOSCOPIC IMAGE CONSTRUCTION METHOD

摘要

PURPOSE: To provide a stereoscopic image construction system for an electron microscope image by which images are successively captured while rotating a specimen in a tilted state by using an electron microscope, a stereoscopic image is generated on the basis of the plurality of images, an image of the specimen viewed from any directions can be displayed and printed and a stereoscopic shape of the specimen can be created, and a stereoscopic image construction method.CONSTITUTION: The stereoscopic image construction system includes an irradiation system, a specimen fixing table, a tilting mechanism, a rotating mechanism, a specimen moving mechanism, a detector, image generation means, specimen rotation means, and image acquisition means for successively acquiring an image generated at that time by planarly scanning the specimen which is successively rotated in a step shape at a predetermined angle, while irradiating the specimen with a charged particle beam that is narrowed in a state of the predetermined angle. On the basis of a plurality of images which are acquired successively, a stereoscopic image of the specimen viewed from an outer circumferential direction is generated.SELECTED DRAWING: Figure 1