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Imaging device, interference fringe analysis program and interference fringe analysis method
Imaging device, interference fringe analysis program and interference fringe analysis method
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机译:成像装置,干涉条纹分析程序和干涉条纹分析方法
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摘要
An imaging apparatus includes a shearing interferometer and a calculation unit configured to calculate information on an object from an interference pattern obtained by the shearing interferometer, wherein the calculation unit solves, as simultaneous equations, three or more equations that express Fourier components at coordinates in a wave number space obtained by performing a windowed Fourier transform on the interference pattern.
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