Exposure for the LED light source module, exposure for the LED light source device and the exposure for the LED light source device management system

摘要

As for this invention various sizes and exposure target ones of type and photoresist of various characters such as semiconductor wafer and display panel (Photo resist and PR) in order for it to be possible to expose in one illuminant, LED (Light Emitting Diode) to offer the single illuminant module which the illuminant unit which is made the illuminant large number is included, this manage adjusting the strength of the exposure illuminant minutely and simply by offering the device and the management system which efficiently and can control, exposure target ones the accuracy and it to be possible to expose quickly, quick and the simplicity for faultThe LED illuminant module for exposure whose treatment is possible, the LED light equipment for exposure, and the LED light equipment management system for exposure are offered. Choice figure Drawing 1