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Wavefront sensor and adaptive optics system

机译:波前传感器和自适应光学系统

摘要

PROBLEM TO BE SOLVED: To provide a wavefront sensor capable of improving a processing speed and reducing a cost.;SOLUTION: The wavefront sensor performs a control to scan and read a plurality of preset partial image areas 12 in at least one scanning direction of a horizontal scan and a perpendicular scan of a two-dimensional detector 10 and not to scan an image area other than the plurality of partial image areas 12. The plurality of partial image areas 12 have predetermined widths parallel to the scanning direction and disposed at substantially equal intervals. An alignment interval of lenslets constituting a lenslet array is configured to be equal to the interval of the partial image areas 12 of the two-dimensional detector 10, and multiple converging-point patterns formed by the lenslets are detected at the partial image areas 12 of the two-dimensional detector 10.;COPYRIGHT: (C)2013,JPO&INPIT
机译:解决的问题:提供一种能够提高处理速度并降低成本的波前传感器;解决方案:该波前传感器执行控制以在至少一个扫描方向上扫描和读取多个预设局部图像区域12。二维检测器10的水平扫描和垂直扫描,并且不扫描除多个部分图像区域12之外的图像区域。多个部分图像区域12具有平行于扫描方向的预定宽度,并且设置为大致相等间隔。构成小透镜阵列的小透镜的对准间隔被配置为等于二维检测器10的部分图像区域12的间隔,并且在该小透镜阵列的部分图像区域12处检测由小透镜形成的多个会聚点图案。二维检测器10 .;版权所有:(C)2013,日本特许厅&INPIT

著录项

  • 公开/公告号JP5818643B2

    专利类型

  • 公开/公告日2015-11-18

    原文格式PDF

  • 申请/专利权人 三菱電機株式会社;

    申请/专利号JP20110247634

  • 发明设计人 安藤 俊行;鈴木 二郎;

    申请日2011-11-11

  • 分类号G01J9/00;

  • 国家 JP

  • 入库时间 2022-08-21 14:40:37

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