Rotating-Element Spectroscopic Ellipsometer and Method for Measurement Precision Prediction of Rotating-Element Spectroscopic Ellipsometer, Recording Medium Storing Program for Executing the Same, and Computer Program Stored in Medium for Executing the Same

摘要

Provided are a rotating-element spectroscopic ellipsometer and a method for measurement precision prediction of a rotating-element spectroscopic ellipsometer, a recording medium storing program for executing the same, and a computer program stored in a medium for executing the same, and more particularly, a rotating-element spectroscopic ellipsometer and a method for measurement precision prediction of a rotating-element spectroscopic ellipsometer capable of calculating the measurement precision of the rotating-element spectroscopic ellipsometer based on a theoretical equation on standard deviations of ellipsometric parameters for a sample, a recording medium storing program for executing the same, and a computer program stored in a medium for executing the same.