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Ultra-low oxygen and humility loadport and stocker system
Ultra-low oxygen and humility loadport and stocker system
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机译:超低氧气和谦卑的装载端口和储料系统
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摘要
One or more apparatuses for adjusting at least one of an oxygen content or a water content in a pod and methods of their use are provided, where one or more semiconductor wafer are selectively stored within a storage chamber of the pod. The apparatus comprises the pod and a pipeline. The pod comprises the storage chamber and a port. The port comprises a receptacle having a first opening and a constraining ring proximate the first opening. The pipeline comprises a pipe, a diffuser attached to a first end of the pipe and a controller attached to a second end of the pipe.
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