Vacuum arc source of voltaic arc, as well as a vacuum evaporation chamber of voltaic arc with a vacuum evaporation source of arc

摘要

Vacuum source of arc vacuum, comprising a ring-shaped magnetic field source (2) and a cathode body (3) with an evaporation material (31) as a cathode (32) for the generation of a discharge of arc on an evaporation surface (33) of the cathode (32), in which the cathode body (3) is limited in a first axial direction by a cathode bottom (34) and in a second axial direction by the evaporation surface (33) in axial direction, and the ring-shaped magnetic field source (2) is polarized parallel or antiparallel to a normal surface (300) of the evaporation surface (33) and is concentrically arranged to normal surface (300) of the evaporation surface (33), in which a magnetic field amplification ring (4) is disposed on a side away from the evaporation surface at a second predetermined distance (A2) in front of the cathode bottom ( 34), characterized in that an inner diameter (DI) of the magnetic field amplification ring (4) is about 3%, in particular up to 10%, preferably up to 15%, especially up to 50% of a cathode diameter (32) and the magnetic field amplification ring comprises a plurality of permanent magnets aligned essentially parallel to the normal surface.