METHOD FOR FABRICATING VITREOUS CARBON MOLD WITH LOW SHAPE CHANGE AND FABIRCATED VITREOUS CARBON MOLD MANUFACTURED USING THE METHOD THEREOF

摘要

A kind of technology is provided, carries out causing to produce when micro-structure and/or nanostructure amorphous carbon mould during carbonization treatment from the main substrate and defect of minimum shape difference, by duplication thermosetting resin and uses the carbonisation. One embodiment according to the invention, this method is for manufacturing vitreous carbon with reduced deformation, and the liquid thermosetting resin for including the following steps: product and the 1st minification are in resin carbonation, curing agent, solvent adjustment viscosity, one second shrinking percentage of the first powder is less than the first shrinking percentage; The master substrate of fine pattern that production polymer is formed in a state and mixture are used in mixed way that double contraction model which fine pattern for being pre-designed is formed; Carbonized polymers precursor. ;The 2016 of copyright KIPO submissions