OPTICAL DESIGN FOR LINE GENERATION USING MICROLENS ARRAY

摘要

embodiments of the present invention, there is provided a substrate support and a laser radiation source, a device including an illumination optical system disposed along the optical path for emitting the laser radiation along an optical path. The illumination optical system includes a set of low-speed shaft and the high speed shaft lens. The apparatus further includes an homogenized disposed between the substrate support and the illumination optical system along the optical path. Comprises first and second micro-optic array of lenslets of the homogenized group of cylindrical lens, the second micro-optical lens of cylindrical lenslets are relatively more lenslet pitch of the first micro-optic array of lenslets of the cylindrical lens further it has a large lenslet pitch, wherein the first micro-optic array of lenslets of the lenslet axes and the second micro lenslets axis of the optical array of lenslets are oriented along an axis parallel to the fast axis of the laser radiation source. ;