GLASS SUBSTRATE FINISH-POLISHING METHOD AND ALKALI-FREE GLASS SUBSTRATE THAT HAS BEEN FINISH-POLISHED BY SAID METHOD

摘要

The present invention relates to a finishing polishing process of the glass substrate polishing the main surface of the glass substrate, by using a polishing slurry containing cerium oxide as abrasive grains, the following alkali-free composition of the glass substrate the glass, when the polishing amount of the glass substrate when the height of the curvature in terms of curvature of 20mm pitch of the principal surface of the glass substrate is to be changed from 0.14 0.10 la X ( ), 0.04 / 0.12 X comprising the step of polishing with the above conditions, to a finishing polishing process of the glass substrate. ;