APPARATUS, METHOD TO ANALYZE CONTAMINANT CONCENTRATION IN TREATMENT SOLUTION, DATA MODELING METHOD THEREFOR, AND SYSTEM TO ANALYZE CONTAMINANT CONCENTRATION IN TREATMENT SOLUTION

摘要

The present invention relates to an apparatus, a method to analyze a contaminant concentration in a treatment solution, a data modeling method therefor, and a system to analyze a contaminant concentration in a treatment solution. According to an embodiment of the present invention, an analysis apparatus comprises: a spectroscopy data generation unit to generate analysis target spectroscopy data using Raman spectroscopy with respect to a treatment solution containing a contaminant; and an analysis unit to store a modeling function between at least one between a Raman peak modeling value appearing in a first wavelength range by Raman spectroscopy with respect to the treatment solution containing a contaminant and a background peak modeling value appearing in a second wavelength range, and a contaminant concentration and the contaminant concentration calculated in the treatment solution from the modeling function using the target spectroscopy data received from the spectroscopy data generation unit.;COPYRIGHT KIPO 2016