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Method for centring a vacuum pump and/or reducing a magnetic leakage field of a vacuum pump or a rotary unit for a vacuum pump, and vacuum pump or rotation unit for a vacuum pump
Method for centring a vacuum pump and/or reducing a magnetic leakage field of a vacuum pump or a rotary unit for a vacuum pump, and vacuum pump or rotation unit for a vacuum pump
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机译:使真空泵对中和/或减小真空泵或真空泵的旋转单元的漏磁场的方法以及真空泵或真空泵的旋转单元
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摘要
The method involves forming a permanent magnet bearing for the mutual rotary mounting of a rotor (16) and a stator. The material-specific properties of the permanent magnetic bearing are changed based on the eccentricity state to change the bearing for reducing the magnetic field generated eccentricity. The eccentricity is measured and the change is made dependent on the measured eccentricity such that the eccentricity is reduced. The material is removed to change the magnetic field. Independent claims are included for the following: (1) a vacuum pump; and (2) a device for of centering of vacuum pump e.g. turbo molecular pump, or rotary unit.
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