SPECTRAL REFLECTANCE DESIGN METHOD, SPECTRAL REFLECTANCE DESIGN DEVICE, AND SPECTRAL REFLECTANCE DESIGN PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a spectral reflectance design method capable of designing spectral reflectances of various waveforms.;SOLUTION: A spectral reflectance design method according to an embodiment of the present invention includes: a spectral reflectance calculating step S4 of calculating the weighted average spectral reflectance R_av(λ,P) by performing a weighted average for a theoretical value RT(λ,t) of the spectral reflectance for each thickness t of thin films by a distribution function(t,P) including a distribution parameter P; and an analysis step S5 of calculating the distribution parameter P by applying the weighted average spectral reflectance R_av(λ,P) to an actual value RM(λ) of the spectral reflectance of the thin film.;SELECTED DRAWING: Figure 9;COPYRIGHT: (C)2017,JPO&INPIT