PATTERN CONTOUR EXTRACTION DEVICE, PATTERN CONTOUR EXTRACTION METHOD, AND PATTERN CONTOUR EXTRACTION PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a pattern contour extraction device with which it is possible to extract a contour in a desired process condition with high accuracy using a small amount of data.SOLUTION: According to an embodiment of the invention, a pattern contour extraction device 20 comprises read-in means, contour extraction means, stacking means, variation amount calculation means, correspondence information calculation means, and contour calculation means. The variation amount calculation means sets a linear measurement line that intersects a plurality of contours laid one on top of another, and calculates a variation amount on a measurement line at each intersection of the measurement line with each contour, with a measurement point on the measurement line used as a point of reference. The correspondence information calculation means calculates, for each measurement line, variation amount-process condition correspondence information indicating relationship between a process condition and a variation amount. The contour calculation means calculates a predicted variation amount on a measurement line, with a measurement point corresponding to a desired process condition used as a point of reference, from the variation amount-process condition correspondence information, calculates, for each measurement line, a calculation point in which a predicted variation amount is added to a measurement point on the measurement line, and calculates a predicted contour linking one calculation point to another.SELECTED DRAWING: Figure 1