MULTILAYER SHEARING MODE PZT MICROACTUATOR FOR SUSPENSION OF DISK DRIVE AND METHOD FOR MANUFACTURING PZT MICROACTUATOR

摘要

PROBLEM TO BE SOLVED: To provide a dual-stage differential (DSA) suspension which is light, fast, and responsive.;SOLUTION: A microactuator includes a disk drive suspension 10, which has multilayer PZT devices 100a and 100b with a first surface and a second surface opposite to each other. Each layer of the multilayer PZT devices is formed to operate in a specific mode when is operated by an operation voltage. The layers are formed as a stack which acts in the same direction when each layer is operated to move by shearing of the first and second surfaces.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT