OPTICAL SENSOR, OPTICAL INSPECTION EQUIPMENT, ANALYTE INSIDE INFORMATION MEASUREMENT METHOD, AND ANALYTE INSIDE CHARACTERISTIC ESTIMATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an optical sensor capable of having high resolution without lowering loadability into an analyte.;SOLUTION: An optical sensor comprises: an irradiation system including a plurality of light source modules LM having a light source for irradiating the same position of an analyte with a plurality of beams of non-parallel light; a control part which controls the light source; and a detection system which detects light emitted by the irradiation system and propagated in the analyte. A light source module LM further has an optical system including a lens and a prism arranged on an optical path of light from the light source and emitting a plurality of beams of non-parallel light to the same position, and at least one light receiving element which receives part of each of the plurality of beams from the optical system. The control part controls the quantity of light emitted by the light source on the basis of the quantity of light received by the light receiving element.;SELECTED DRAWING: Figure 6;COPYRIGHT: (C)2017,JPO&INPIT