PROBLEM TO BE SOLVED: To provide a measurement object measuring program, measurement object measuring method and enlargement observation device that can easily and intuitively recognize a deviation between actual height image data about a specific part of a measurement object and CAD data thereabout.SOLUTION: CAD height image data generation means 504 is configured to generate a plurality of CAD height image data based on basic CAD data, and reference height image data selection means 505 is configured to select reference height image data from the plurality of CAD height image data. Reference appearance image data acquisition means 506 is configured to acquire a reference appearance image corresponding to the reference height image data. Object image display means 507 is configured to display an object image based on texture image data or actual height image data, and reference image display means 508 is configured to display a reference image based on the reference appearance image data or reference height image data.SELECTED DRAWING: Figure 21
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