Electron beam automatic measuring device, parameter automatic setting system for electron beam automatic measuring device, and parameter automatic setting program

摘要

PROBLEM TO BE SOLVED: To provide a technology for preventing the dispersion of reproduction accuracy due to the setting of an automatic length measurement parameter of each operator, and for satisfying fixed reproduction accuracy even when the automatic length measurement parameter is set by any operator.;SOLUTION: An automatic parameter setting system 120 includes: a storage section 124 for storing a plurality of first secondary electronic images and a plurality of first secondary electronic profiles to be created from the plurality of first secondary electronic images and a plurality of length measurement parameters used when the plurality of first secondary electronic images are imaged; and an arithmetic section 123 for setting the length measurement parameter to be used for a length measurement pattern to be measured. The arithmetic section 123 creates a second secondary electronic profile from the secondary electronic image registered as a model, and acquires the length measurement parameter corresponding to the first secondary electronic profile matching the second secondary electronic profile from the storage section 124.;COPYRIGHT: (C)2014,JPO&INPIT