Calcium-deficient calcium-silicon compound thin film and method for producing calcium-deficient calcium-silicon compound

摘要

PROBLEM TO BE SOLVED: To provide a calcium-deficit calcium-silicon compound including scarce impurities and a method for manufacturing the same.SOLUTION: The provided calcium-deficit calcium-silicon compound is obtained by heating CaSiand then reacting the CaSiwith a halogen-containing gas so as to withdraw Ca from the CaSiand to generate CaSi(0y1). It is desirable for the halogen-containing gas to be generated by arranging the CaSiand a metal halide via a gap and then heating the metal halide.