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Underlayer coating composition and method for producing a microelectronic device
Underlayer coating composition and method for producing a microelectronic device
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机译:底层涂料组合物和生产微电子器件的方法
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摘要
The invention relates to an underlayer coating composition comprising a polymer, where the polymer comprises at least one hydroxyaromatic unit in the backbone of the polymer phenol which has a pendant group comprising a fluoro or iodo moiety, and at least one unit comprising an aminoplast. The invention further relates to a process for forming an image using the composition, especially for EUV.
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