Defect judging device and a defect determining method

摘要

PROBLEM TO BE SOLVED: To improve the determination accuracy of a full-length defect while suppressing the overdetection of a defect.;SOLUTION: A defect determination device includes: inspection data acquisition means 11 for acquiring inspection data about a plurality of inspection objects S; first determination means 13 for calculating the mixing rate of a defect about each of regions obtained by dividing the inspection data about the plurality of inspection objects S into unit widths, and for, when the mixing rate of the defect about at least one region exceeds a threshold, determining that the inspection object S is a pseudo defect; and second determination means 16 for, when the position in the width direction of the region where the mixing rate of the defect exceeds the threshold in the inspection object S determined as the pseudo defect is the same among the plurality of inspection objects S, determining that a full-length defect occurs.;COPYRIGHT: (C)2015,JPO&INPIT