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ULTRASONIC ELEMENT ARRAY, ULTRASONIC PROBE, ULTRASONIC APPARATUS, AND MANUFACTURING METHOD FOR ULTRASONIC ELEMENT ARRAY
ULTRASONIC ELEMENT ARRAY, ULTRASONIC PROBE, ULTRASONIC APPARATUS, AND MANUFACTURING METHOD FOR ULTRASONIC ELEMENT ARRAY
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机译:超声元素阵列,超声探头,超声设备以及制造超声元素阵列的方法
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摘要
An ultrasonic element array includes a first piezoelectric element, a second piezoelectric element, a third piezoelectric element, and a fourth piezoelectric element each having a piezoelectric material sandwiched by a first electrode and a second electrode, a first wire connecting the second electrode of the first piezoelectric element and the second electrode of the second piezoelectric element, a second wire connecting the second electrode of the third piezoelectric element and the second electrode of the fourth piezoelectric element, a third wire connecting to the second wire over the first wire, and an insulating film located between the first wire and the third wire, wherein the insulating film has an inorganic insulating film made of an inorganic material and an organic insulating film made of an organic material, and the inorganic insulating film covers the piezoelectric elements.
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