Apparatus and method for liquid transfer imprint lithography using a roll stamp

摘要

In an apparatus and a method for liquid transfer imprint lithography, the apparatus includes a roll unit, a plane unit and a control unit. The roll unit includes a roll stamp, a horizontal moving stage, a roll angular compensating stage and a roll rotating part. The plane unit is disposed under the roll unit and includes a first substrate, a first fixing chuck, a first substrate driving part, a second substrate, a second fixing chuck and a second substrate driving part. The control unit controls an operation of the roll unit and the plane unit.