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Ionization balance device with shielded capacitor circuit for ion balance measurements and adjustments

机译:带有屏蔽电容器电路的电离平衡装置,用于离子平衡的测量和调整

摘要

In one example, this disclosure describes a circuit and techniques that may be used to measure the ion balance in an ionization balance device (10). The described circuit comprises a capacitor (22) that includes two conductors (23, 24), wherein a first one (23) of the conductors is exposed to the output of the ionization device, and the second one (24) of the conductors is shielded from the output of the ionization device. The first conductor may accumulate charge so as to quantify the output of the ionization balance device. A switch (29) may be used to discharge the first conductor at periodic intervals in order to measure the accumulated charge on the first conductor, and signal processing may be performed on this discharge measurement in order to generate feedback that can be used to control and adjust the output of an ion source.
机译:在一个示例中,本公开描述了可用于测量电离平衡装置( 10 )中的离子平衡的电路和技术。所描述的电路包括电容器( 22 ),该电容器包括两个导体( 23、24 ),其中,导体中的第一个( 23 )暴露于电离装置的输出,而导体的第二个( 24 )与电离装置的输出隔离。第一导体可以积累电荷,以便量化电离平衡装置的输出。可以使用开关( 29 )定期对第一导体放电,以便测量第一导体上的累积电荷,并且可以对该放电测量进行信号处理以生成反馈可用于控制和调整离子源的输出。

著录项

  • 公开/公告号US9588161B2

    专利类型

  • 公开/公告日2017-03-07

    原文格式PDF

  • 申请/专利权人 SIARHEI V. SAVICH;

    申请/专利号US201113991926

  • 发明设计人 SIARHEI V. SAVICH;

    申请日2011-11-29

  • 分类号G01R27/26;H01T23/00;

  • 国家 US

  • 入库时间 2022-08-21 13:41:40

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