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System and method for reducing flow perturbations and improving the accuracy of a rate of decay measurement in a mass flow controller
System and method for reducing flow perturbations and improving the accuracy of a rate of decay measurement in a mass flow controller
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机译:减少流量扰动并提高质量流量控制器中衰减率测量精度的系统和方法
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摘要
A mass flow controller includes a fluid inlet, a fluid outlet, and a conduit defining a flow path along which the fluid flows through the mass flow controller. The mass flow controller includes an inlet block having an inlet aperture, an inlet channel fluidly coupled to the conduit, and one or more restrictors positioned along the flow path between the inlet aperture and inlet channel to minimize flow perturbations when a rate of decay measurement is taken or when flow the amount of pressure supplied to the valve inlet is otherwise interrupted.
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