首页> 外国专利> LORENTZ ACTUATOR, OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND LORENTZ ACTUATOR OPERATING METHOD

LORENTZ ACTUATOR, OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND LORENTZ ACTUATOR OPERATING METHOD

机译:洛伦茨执行器,对象定位系统,光刻设备和洛伦茨执行器的操作方法

摘要

The invention relates to a Lorentz actuator comprising: - a magnet arrangement; - a coil arrangement; - a current controller for supplying a current to the coil arrangement; wherein the magnet and coil arrangement are moveable relative to each other in a main direction, wherein the coil arrangement comprises a first and second coil portion that are separately operable by the current controller, such that when the same current is supplied to the first coil portion as is supplied to the second coil portion, Lorentz forces generated in the main direction by the first and second coil portion are also the same, and wherein the current controller is configured to supply a current to the first and second coil portions with a phase difference in order to compensate for parasitic reluctance and/or Lorentz forces in an auxiliary direction perpendicular to the main direction.
机译:洛伦兹致动器技术领域本发明涉及一种洛伦兹致动器,其包括:-磁体装置; -线圈装置; -用于向线圈装置供应电流的电流控制器;其中,磁体和线圈装置可在主方向上相对移动,其中,线圈装置包括第一线圈部分和第二线圈部分,该第一线圈部分和第二线圈部分可由电流控制器分别操作,从而当相同的电流提供给第一线圈部分时当被供应到第二线圈部分时,由第一和第二线圈部分在主方向上产生的洛伦兹力也相同,并且其中电流控制器被配置为以相位差向第一和第二线圈部分供应电流。为了补偿垂直于主方向的辅助方向上的寄生磁阻和/或洛伦兹力。

著录项

  • 公开/公告号WO2017032540A1

    专利类型

  • 公开/公告日2017-03-02

    原文格式PDF

  • 申请/专利权人 ASML NETHERLANDS B.V.;

    申请/专利号WO2016EP67975

  • 申请日2016-07-28

  • 分类号G03F7/20;H02K41/03;H01F7/06;H02K41/035;H02K15/03;H02K29/06;

  • 国家 WO

  • 入库时间 2022-08-21 13:31:56

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