公开/公告号WO2017053518A1
专利类型
公开/公告日2017-03-30
原文格式PDF
申请/专利权人 THE GOVERNMENT OF THE USA AS REPRESENTED BY THE SECRETARY OF THE NAVY;MAHADIK NADEEMULLAH A.;STAHLBUSH ROBERT E.;IMHOFF EUGENE A.;TADJER MARKO J.;
申请/专利号WO2016US53018
申请日2016-09-22
分类号H01L21/3105;H01L21/324;H01L21/67;H01L21/56;H01L21/02;
国家 WO
入库时间 2022-08-21 13:31:36