PERFORMANCE EVALUATION SYSTEM FOR SCRUBBER CAPABLE OF ADJUSTING GAS INFLOW AND CONCENTRATION TO EVALUATE PERFORMANCE OF SCRUBBER

摘要

The present invention relates to a system capable of evaluating performance of a scrubber which combusts process gas discharged during a semiconductor manufacturing process using fuel such as LNG to treat only target gas such as greenhouse gas or harmful gas, and more specifically, to a performance evaluation system for a scrubber capable of adjusting a gas inflow and a concentration to evaluate performance of a scrubber which tests performance of a corresponding scrubber, namely treatment efficiency of target gas according to a change in a condition frequently changed during a semiconductor manufacturing process to install and use a scrubber most suitable for a semiconductor manufacturing facility to increase the treatment efficiency of the target gas using a small amount of energy. According to the present invention, a semiconductor manufacturing company can establish a gas discharge guideline in accordance with various environment regulations, and prepare a selection evaluation reference of a scrubber to use a most efficient and suitable scrubber to prevent global warming and environmental pollution.;COPYRIGHT KIPO 2016