- Method for size-up of quartz glass ingot

摘要

The present invention relates to a method of manufacturing a quartz glass ingot, comprising the steps of: placing a plurality of quartz glass ingots in a mold next to each other; charging a mold containing a plurality of quartz glass ingots into the chamber; reducing the pressure in the chamber to a vacuum state And heating and maintaining the temperature in the chamber to be in the range of 1800 to 1900 캜 so that the plurality of quartz glass ingots are melted, and cooling the molten quartz glass ingot to melt, Characterized in that a mold made of a graphite material is used to make the inner side wall which is in contact with the glass made of DLC (diamond like carbon) or tungsten carbide (WC) material and the outer side wall to serve as a self heating source Up method of a semiconductor device. According to the present invention, it is possible to manufacture a quartz glass ingot having a small size and a small birefringence so that a quartz glass ingot previously formed has a large area without changing optical or mechanical properties.