PREPARATION METHOD OF REUSED ITO TARGET AND REUSED ITO TARGET PREPARED THEREBY

摘要

The present invention relates to a preparation method of a reused ITO target and a reused ITO target prepared thereby. The preparation method of the present invention comprises: (a) a step of acquiring an ITO sintered body with a consumed part by separating a first backing plate from a completely used ITO target; (b) a step of removing impurities by cleaning the ITO sintered body; (c) a step of forming a ceramic coating layer by coating a consumed part of the ITO sintered body, from which the impurities are removed, with a ceramic composition; and (d) a step of combining a second backing plate with the bottom of the ceramic coating layer. The present invention aims to provide a preparation method of a reused ITO target with a high density and excellent properties.;COPYRIGHT KIPO 2017