METHOD FOR MANUFACTURING TEMPORARY ADHESIVE FILM TEMPORARY ADHESIVE FILM LAYERED BODY LAYERED BODY PROVIDED WITH DEVICE WAFER AND TEMPORARY ADHESIVE COMPOSITION

摘要

The present invention also provides a method for producing an adhesion film excellent in peelability and capable of controlling a peeling interface, an adhesion film, a laminate, a laminate with a device wafer, and a composition for adhesion.A method for producing an adhesive film comprising the step of applying a layer of an adhesive composition on a support in the form of a layer and drying the composition, wherein the adhesive composition comprises a compound having a fluorine atom and the adhesive film (11) The ratio of the presence of fluorine atoms in the surface a of the adherent film opposite to the support and the ratio A of the fluorine atoms on the surface of the support film on the support side Wherein the abundance ratio B satisfies the relationship of the formula (1) and the abundance ratio A of the fluorine atoms is 5 to 40%.Equation (1); A / B 1.3