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SAW SAW Resonator having negative profile Metal Structure and the Manufacturing Method thefeof
SAW SAW Resonator having negative profile Metal Structure and the Manufacturing Method thefeof
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机译:具有负轮廓金属结构的声表面波声表面波谐振器及其制造方法
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摘要
Disclosed is a surface acoustic wave (SAW) resonator. The SAW resonator according to the present invention comprises: a piezoelectric substrate; a plurality of metal structures formed on an upper surface of the piezoelectric substrate and having a negative profile; and a temperature compensating thin film surrounding the upper surface of the piezoelectric substrate and the plurality of metal structures. Therefore, the SAW resonator according to the present invention has a frequency characteristic insensitive to change in the profile and has a high antiresonance Q value characteristic.
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