MICRO BOLOMETERS WITH IMPROVED FILL FACTOR AND METHOD OF MANUFACTURING MICRO BOLOMETERS

摘要

The present invention relates to a microbolometer with an improved fill factor and a manufacturing method thereof. The microbolometer comprises: an insulating layer; an electrode; a reflective layer; and a cover layer. The insulating layer has a first upper surface and a second upper surface lower than the first upper surface. The electrode is disposed on the first upper surface. The reflective layer is disposed on the second upper surface. The cover layer is disposed on the electrode and the reflective layer, defines a cavity overlapping the reflective layer, wherein temperature is changed by absorption infrared rays.