MEMS MEMS METHOD OF MODIFYING SURFACE OF BASE FILM FOR MEMS-BASED FILM TYPE PROBE AND METHOD OF MANUFACTURING MEMS-BASED FILM TYPE PROBE FOR DISPLAY INSPECTION

摘要

A surface modification method of a base film for a MEMS-based film-type probe capable of preventing surface deformation of a base film in a MEMS process for manufacturing a MEMS-based film-type probe, and a method for manufacturing a MEMS-based film-.A method of modifying a surface of a base film for a MEMS-based film-type probe according to the present invention comprises the steps of: plasma processing one surface or both surfaces of a base film; And applying a resin composition capable of UV curing or thermosetting to the surface of the base film subjected to the plasma treatment, drying and aging the film, and then performing UV curing or thermal curing to form a support layer on one side or both sides of the plasma-The method comprising the steps of: