首页> 外国专利> SERS SERS SERS NANOTRANSFER PRINTING METHOD AND SURFACE-ENHANCED RAMAN SCATTERING SUBSTRATE SURFACE-ENHANCED RAMAN SCATTERING VIAL AND SURFACE-ENHANCED RAMAN SCATTERING PATCH MANUFACTURED USING THE SAME

SERS SERS SERS NANOTRANSFER PRINTING METHOD AND SURFACE-ENHANCED RAMAN SCATTERING SUBSTRATE SURFACE-ENHANCED RAMAN SCATTERING VIAL AND SURFACE-ENHANCED RAMAN SCATTERING PATCH MANUFACTURED USING THE SAME

机译:SERS SERS SERS纳米转移印刷方法和表面增强的拉曼散射小瓶和表面增强的拉曼散射小瓶以及使用相同方法制造的表面增强的拉曼散射斑

摘要

According to an embodiment of the present invention, there is provided a nano-transfer printing method comprising: coating a polymer thin film on a template substrate having a surface pattern formed thereon; Fabricating the polymer thin film as a duplicate thin film mold using the polymer thin film and the adhesive film; Forming a nanostructure on the duplicate thin film mold; Selectively weakening the adhesive force between the adhesive film and the duplicate thin film mold; And transferring the nanostructure to a target object.
机译:根据本发明的实施方式,提供了一种纳米转移印刷方法,该方法包括:将聚合物薄膜涂布在其上形成有表面图案的模板基板上;使用聚合物薄膜和粘合膜将聚合物薄膜制造为复制薄膜模具。在复制的薄膜模具上形成纳米结构;选择性地削弱粘合膜与复制薄膜模具之间的粘合力;然后将纳米结构转移到目标物体上。

著录项

  • 公开/公告号KR101761010B1

    专利类型

  • 公开/公告日2017-07-25

    原文格式PDF

  • 申请/专利权人 한국과학기술원;

    申请/专利号KR20150129896

  • 申请日2015-09-14

  • 分类号H01L21/02;H01L21/027;H01L21/70;H01L29/06;

  • 国家 KR

  • 入库时间 2022-08-21 13:25:09

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