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MONOMER FOR HARDMASK COMPOSITION HARDMASK COMPOSITION AND METHOD OF FORMING PATTERNS USING THE HARDMASK COMPOSITION
MONOMER FOR HARDMASK COMPOSITION HARDMASK COMPOSITION AND METHOD OF FORMING PATTERNS USING THE HARDMASK COMPOSITION
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机译:HARDMASK组合物的单体HARDMASK组合物和使用HARDMASK组合物形成图案的方法
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摘要
A monomer for a hard mask composition represented by Formula 1 below; A hard mask composition comprising the monomer, a polymer for a hard mask composition comprising the monomer structure, or a combination thereof; And a pattern forming method using the hard mask composition. [Chemical Formula 1] In Formula 1, A 1 , A 2 , L 0 , L 1 and L 2 are as defined in the specification.
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