METHOD FOR PRODUCING ALIGNED LINEAR BREAKING POINTS BY ULTRA-SHORT FOCUSSED PULSED LASER RADIATION AND METHOD AND DEVICE FOR SEPARATING A WORKPIECE BY MEANS OF ULTRA-SHORT FOCUSSED LASER RADIATION USING A PROTECTIVE GAS ATMOSPHERE

摘要

The present invention provides a process for separating a transparent workpiece (2). Aligned filament forming portions 4, 5, 6 extending transversely with respect to the workpiece are generated by an ultrarapower laser pulse along the intended breaking line 20. The workpiece is separated in a subsequent step.