An acoustic vector sensor based on the biomimetic artificial hair cell and the method for manufacturing

摘要

The biomimetic iso model underwater acoustic vector sensor of the present invention comprises an induction element 21, 23 which is vertically erected at the center of the annular frame 25 to sense and amplify the sound pressure coming from the outside, A plurality of receivers 22a, 22b, and 22c connected to the amplifiers 22a and 22b and converting the amplified signals into electrical signals and generating a voltage in accordance with the magnitude of the electrical signal, and output voltages of the receivers 22a, 22b, and 22c are used (24a, 24b, 24c) integrated with the receptors (22a, 22b, 22c) so as to be fixed to a relative part (e.g., a PCB substrate) and is manufactured by a powder injection molding method, A three-dimensional single island model piezoelectric structure imitates the fish cilia biometrically and implements the feature of measuring acoustic vector signals in the water.;