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PRESSURE METER BASED ON NANO- AND MICROELECTROMECHANICAL SYSTEM WITH BEAM ELASTIC ELEMENTS
PRESSURE METER BASED ON NANO- AND MICROELECTROMECHANICAL SYSTEM WITH BEAM ELASTIC ELEMENTS
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机译:基于带梁弹性元件的纳米和微机电系统的压力表
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摘要
FIELD: measurement equipment.;SUBSTANCE: pressure meter comprises a housing mounted therein nano- and micro-electromechanical systems (NandMEMS) consisting of membrane cushions power transmitting rod connected to the beam and having a slot opening on a flat surface which is formed from a heterogeneous structure of thin film materials, contact pads, the connecting conductors. Formed in a heterogeneous structure gages consist of identical tensor elements connected by jumpers included in a bridge measuring circuit. Tensor elements included into the opposite arms of a bridge measuring circuit are placed on a flat surface of the beam, and other centers of tensor elements included in the opposite arms of a bridge measuring circuit, are placed on a flat surface of the beam. The diameter of the holes, the thickness of the beam and the diameter of the power transmitting rod defined as the established relationships.;EFFECT: improved accuracy and sensitivity of the sensor.;2 dwg, 1 tbl
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