首页> 外国专利> MONITORING OF THE PROGRESS OF MELTING BY LIBS TECHNIQUE IN THE PREPARATION OF AN INGOT BY DIRECTIONAL SOLIDIFICATION BY SEED RECOVERY

MONITORING OF THE PROGRESS OF MELTING BY LIBS TECHNIQUE IN THE PREPARATION OF AN INGOT BY DIRECTIONAL SOLIDIFICATION BY SEED RECOVERY

机译:用LIBS技术监测种子恢复定向凝固制备锭的进展。

摘要

The invention relates to a method useful for monitoring the progress of the melting during the production of a silicon ingot by germ-directed solidification, comprising at least the steps of:(i) disposing, in a crucible, a silicon charge positioned on the surface of one or more silicon seeds;said one or more seeds, and / or said silicon charge in one or more given position (s), comprising one or more tracer agents chosen from n-type or p-type doping agents having a partition coefficient in the silicon less than or equal to 10 -1; metal elements having a partition coefficient in silicon less than or equal to 10 -4; and the iso-electronic elements of silicon germanium and tin;(ii) evaluating, during the melting of the silicon charge, the presence and / or amount of tracer agent (s) by a chemical measurement technique of the LIBS type on the surface of the molten silicon bath; and(iii) determine, based on the LIBS measure (s), the progress of the merger.
机译:本发明涉及一种用于监测通过细菌定向凝固在生产硅锭期间的熔化过程的方法,该方法至少包括以下步骤:(i)在坩埚中放置一个或多个硅籽晶表面上的硅料;所述一个或多个种子和/或所述一个或多个给定位置的硅电荷,其包含一种或多种示踪剂,所述示踪剂选自在硅中的分配系数小于或等于的n型或p型掺杂剂。到10 -1;在硅中的分配系数小于或等于10 -4的金属元素;硅锗和锡的等电子元素;(ii)在熔化硅料期间,通过LIBS型化学测量技术在熔融硅浴的表面上评估示踪剂的存在和/或含量;和(iii)根据LIBS措施确定合并的进度。

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