PROCESSING DEVICE, ESTIMATION METHOD OF ADJUSTMENT PARAMETER PREDICTION MODEL, AND ESTIMATION PROGRAM OF ADJUSTMENT PARAMETER PREDICTION MODEL

摘要

PROBLEM TO BE SOLVED: To provide a method to estimate an adequate model as prediction model of an adjustment parameter.;SOLUTION: When a prediction model estimation device 30 (a prediction model estimation part) estimates a prediction model to predict an adjustment parameter which is inputted into a product 50 to adjust a characteristic value to a center of an allowable range approximately, the device expresses the prediction model as a model containing system noises having unknown dispersion which is an error caused by approximation or discretization, or an error having an unclear cause and a correction error having known or presumable dispersion which is caused by measuring conditions during the characteristic value measurement or caused by the correction of adjustment parameters. The prediction model estimation part estimates the prediction model on the basis of likelihood functions expressed by using dispersions of the system noise and dispersions of the correction error.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT