DRY LEVEL MEASUREMENT DEVICE, AND DRY LEVEL MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a dry level measurement device that is hard to be deteriorated.;SOLUTION: A dry level measurement device comprises: an inspection tube 21 that flows a wet vapor internally, and has windows 121A and 121B provided; an environment sensor 16 that measures an environment condition; opening and closing protection members 122A and 122B that can cover an inner side of the windows 121A and 121B in responce to a change in environment condition; an inspection light emission unit 11 that emits inspection light having at least a wavelength to be absorbed by a saturation liquid inside the inspection tube 21 via the windows 121A and 121B; a light reception unit 12 that receives inspection light passing through an interior of the inspection tube 21; an absorbance calculation unit 301 that calculates absorbance of a wet vapor due to the inspection light on the basis of the inspection light received by the light reception unit 12; and a dry level identification unit 302 that identifies a dry level of the wet vapor when the protection members 122A and 122B open on the basis of the absorbance of the wet vapor due to the inspection light.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT