EFFECTIVE LIFETIME MEASUREMENT METHOD FOR EXCESS MINORITY CARRIER AND EFFECTIVE LIFETIME MEASUREMENT DEVICE FOR EXCESS MINORITY CARRIER

摘要

PROBLEM TO BE SOLVED: To provide an effective lifetime measurement method for an excess minority carrier capable of highly accurately calculating the effective lifetime of the excess minority carrier, and an effective lifetime measurement device for the excess minority carrier.;SOLUTION: An effective lifetime measurement method for an excess minority carrier includes: a first step of measuring photoconductivity σ_ph of a semiconductor while changing an irradiation light intensity I_ph of a light with which the semiconductor is irradiated, and obtaining multiple plot points indicating a relationship between the irradiation light intensity σ_ph and the photoconductivity σ_ph of the semiconductor; a second step of calculating an approximate straight line for each of multiple aggregates 1 consisting of continuous multiple plot points, calculating photoconductivity σ_int in a case where the irradiation light intensity I_ph is 0 in the multiple approximate straight lines, and defining a maximum value of the photoconductivity as photoconductivity σ_trap caused by trapping of the excess minority carrier; and a third step of using the photoconductivity σ_trap caused by the trapping to calculate an effective lifetime τ of the excess minority carrier.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT