SCANNING MICROELECTROMECHANICAL REFLECTOR SYSTEM, LIGHT-DETECTING AND RANGING (LIDAR) DEVICE, AND METHOD FOR OPERATING SCANNING MICROELECTROMECHANICAL REFLECTOR SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a scanning microelectromechanical reflector system capable of increasing an actuation range of an actuator unit even on a small surface area.SOLUTION: A scanning microelectromechanical reflector system comprises a frame 32, a reflector 31, and at least one actuation unit 36. Each actuation unit 36 comprises an actuator 35 and a suspender 34. The suspender 34 is fixed from a first fixing point 311 to the frame 32, from a second fixing point 312 to the reflector 31, and from a third fixing point 313 to the actuator 35. When the third fixing point 313 is projected onto a line extending through the first fixing point 311 and the second fixing point 312, the projection of the third fixing point 313 lies between the first fixing point 311 and the second fixing point 312.SELECTED DRAWING: Figure 3