Method of assigning the pupil facet of the pupil facet mirror of the illumination optical unit of the projection exposure apparatus to the field facet of the field facet mirror of the illumination optical unit

摘要

Methods are disclosed for assigning a pupil facet of a pupil facet mirror of an illumination optical unit of a projection exposure apparatus to a field facet of a field facet mirror of the illumination optical unit for the definition of an illumination channel for a partial beam of illumination light.