A deposition apparatus for depositing an organic material in a vacuum chamber having an evaporation source for an organic material, an evaporation source for an organic material, and a method for evaporating an organic material

摘要

PROBLEM TO BE SOLVED: To provide an improved evaporation source for an organic material, a deposition apparatus for depositing the organic material, and a method for evaporating the organic material.SOLUTION: There are provided a deposition device 200 and method comprising: an evaporation source 100 comprising an evaporation crucible 104 which is configured to evaporate an organic material, a distribution pipe 106 which is in fluid communication with the evaporation crucible 104, can rotate around an axis during evaporation, and has one or a plurality of discharge ports, and at least one side shield 202 which shields the organic material, the evaporation source 100 evaporating the organic material in a vacuum chamber 110; and a substrate support system which is arranged in the vacuum chamber 110 and has at least two tracks 220, the substrate support system being so configured that the at least two tracks 220 of the substrate support system are configured for supporting a substrate 121 or a carrier carrying the substrate 121 in the vacuum chamber 110 essentially vertically.SELECTED DRAWING: Figure 2